產品資訊半導體等級壓力表/壓力傳感器
(EP/BA)

Ultra high purity pressure gauge (EP grade)_P810 series (316L type)

P810 series (316L type)

產品介紹

Service intended

P810 series are specially designed for the ultra-high purity gas distribution system used in a semiconductor, electronic, medical, biotechnology, and pharmaceutical industry.

Nominal diameter
35 (1½"), 50 (2") and 63 mm (2½")
Accuracy
Grade A : 50 (2") and 63 mm (2½")
Grade B : 35 (1½"), 50 (2") and 63 mm (2½")
Scale range
-0.1 ~ 0 to 0 ~ 28 MPa
Working pressure
Steady pressure : 75 % of full scale value
Fluctuating pressure : 67 % of full scale value
Working temperature
Ambient : -40 ~ 65 °C
Fluid : Max. 100 °C
Temperature effect
 Accuracy at temperature above and below the reference temperature (20 ℃) will be effected by approximately
±0.4 % per 10 ℃ of full scale

Standard features

Pressure connection
Type 316L SS electropolished low mount or center back mount
surface finish Ra≤0.25 ㎛
■ ¼" NPT male thread
■ VCR® male or female face seal fitting
Element
 Type 316L SS
<6 MPa : C-type bourdon tube
≥6 MPa : Helical type bourdon tube
Case
Type 304SS, Electropolished with pressure relief
Cover and window
Twist-lock polycarbonate
Movement
 Stainless steel
Dial
White aluminium with pointer stop pin
With black/red lettering, Dual pressure scale (bar/psi)
Pointer
Black painted aluminium alloy
Helium leak rate
 Tested to confirm leakage rates of less than
10 mbar • ℓ/sec
Option
100 mm : P252 dimension
Certificates ATEX Ex II GD c IIC TX

© WISE Control Inc. All rights reserved. ALL PRODUCT, PRODUCT SPECIFICATIONS AND DATA ARE SUBJECT TO CHANGE WITHOUT NOTICE TO IMPROVE RELIABILITY, FUNCTION OR DESIGN OR OTHERWISE.

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